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Journal of Physics: Conference Series OPEN ACCESS Related

In our previous study, the influence of the ion transport under the distorted electric field on the anisotropic etching of Si was discussed in [7]. Then, we numerically investigated feature profile evolution of deep Si etching under the presence of plasma molding in a two-frequency capacitively coupled plasma (2f-CCP) in sf 6/O2. We focusedGet price

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GENERON® Oxygen PSA Generators separates oxygen (O2) from compressed air utilizing pressure swing adsorption technology. Compressed air, which consists of approximately 21% oxygen and 78% nitrogen, is passed through a bed of zeolite molecular sieve (ZMS).Get price